Skip to main content

Silicon Nitride Sputtering Targets and Applications

Silicon nitride( Si3N4 )  is a chemical compound which consists of the elements silicon and nitrogen. Silicon Nitride (White to gray)(Si3N4) Sputtering Targets (Size:2'' ,Thickness:0.125'' , Purity: 99.9%) is the most thermodynamically stable of the silicon nitrides. Hence, Si3N4 is the most commercially important of the silicon nitrides It is a white, high-melting-point solid that is relatively chemically inert. Silicon nitride has a high thermal stability.
Silicon nitride sputtering targets is mainly applied in microelectronics as an insulator and a chemical barrier for protective packaging of devices. As a passivation layer, silicon nitride presents a higher diffusion barrier against water molecules and sodium ions, which is essential in microelectronics. In addition, silicon nitride has high thermal stability, elevated hardness and good dielectric properties. In optics, silicon nitride provides great transparency in spectral range from 300 to 1200 nm. Therefore, it’s possible to use silicon nitride in biochemical and biomedical optical applications. Typically, silicon nitride thin-films are fabricated by chemical vapor deposition at low gas pressure (LPCVD) and plasma-enhanced (PECVD). Nevertheless, RF sputtering depositions offer some advantages over previously mentioned techniques, such as absence of toxic gases (replaced by inert gases); lower deposition temperature especially for bio and organic applications; versatility and simplicity to change the parameters of film growth and a lower stressful stoichiometry.
Silicon nitride can be used as a complementary protective coating on solid state lithium batteries only fabricated using PVD techniques. A battery is composed by two electrodes (cathode and anode) and one electrolyte between them, acting as an electrical insulator. In lithium batteries, the anode is normally metallic lithium, which oxidizes very quickly in contact with air and water. Thus, it is essential to achieve an effective protection for lithium anode. Taking this as starting point, the purpose of this study is to complement this first protective layer with silicon nitride fabricated by RF sputtering. Thereby, a complete lithium battery will be fabricated in series, resorting only to PVD techniques, avoiding the necessity of a glove box and a CVD chamber.
Labels:

Comments

Post a Comment

Popular posts from this blog

Molybdenum Trioxide Nanoparticles/Nanopowder and Applications

General Information about Molybdenum Trioxide                                                     Molybdenum trioxide is chemical compound with the formula MoO3. Its chief application is as an oxidation catalyst and as a raw material for the production of molybdenum metal.  Molybdenum Trioxide  is a very light blue powder. Molybdenum Trioxide Nanoparticles/Nanopowder and Their Applications                                                    Like many  nanoparticles/nanopowder , Molybdenum Trioxide nanoparticles/nanopowder are used as catalysts. These catalysis reactions include hydrogenation catalysis and cracking catalysis. Molybdenum Trioxide nanoparticles/  nanopowder are useful for...
Post a Comment
Read more

Improving Dialysis Process with Graphene

Researchers from Mechanical and Electrical Engineering Departments of MIT recently showed that graphene is a powerful material candidate for use in the dialysis systems (such as hemodialysis machines in medical institutes for filtering human blood). In order to prepare graphene as a dialysis material, researchers used a procedure opposite to the general treatments that nanotechnology people use. Dialysis is a process of filtering different solutions such as human blood by a membrane in order to remove waste molecules, drugs, chemical residues from the solution. In some cases, the process can be used for purification of chemicals or isolation of different molecules for medical diagnosis. It is an essential process for scientists especially in the medical operations. Image Retrieved From: http://www.graphene-nownano.manchester.ac.uk/our-research/examples-of-current-projects/fundamental-science/use-of-graphene-as-bio-membrane/ The traditional membranes used in dialysis are thick ...
Post a Comment
Read more

Graphene Oxide Dispersion

Graphene oxide refers to a mono-atomic layer material obtained when graphite crystals are oxidized. This is one of the graphene materials that are commercially available because of  its ability to dissolve in water  which makes the oxidation process suitable. In this article, we will talk about the  synthesis, the properties and some of the applications of graphene oxide dispersion in water . Seven Properties of Graphene Oxide Dispersion The properties of a material are defined through its structure, however, this material is very peculiar, since there is no unambiguous model of this material. Graphene Oxide dispersion offers remarkable physical, chemical and mechanical properties that give the opportunity to new applications. Graphene Oxide is amorphous , but, in general, graphene oxide can be described as a two-dimensional sheet containing honeycomb carbon atoms with functional groups of hydroxide and oxygen, unlike the graphene model that seeks to completely re...
Post a Comment
Read more