Nanografi Nanotechnology

Silicon Nitride Coating - stoichiometric trisilicon tetranitride (Si3N4) thanks to its very high mechanical and thermal stability is used for tools such as roller bearings used under harsh conditions. In the semiconductor industry, silicon nitride layers are used as dielectric material, passivation layers or can act as hardmask mask. Silicon Nitride has good high temperature strength, creep resistance and oxidation resistance. Silicon Nitride's low thermal expansion coefficient gives good thermal shock resistance. Silicon Nitride is produced in three main types; Reaction Bonded Silicon Nitride (RBSN), Hot Pressed Silicon Nitride (HPSN) and Sintered Silicon Nitride (SSN). There are two main depositions of silicon nitride layers: LPCVD Silicon Nitride – Low pressure chemical vapor deposition silicon nitride. LPCVD silicon nitride layers are easily deposited on silicon wafers in a reproducible, pure and uniform way. This leads to silicon nitride layers with low electrical condu...