Erbium Oxide Sputtering Targets and Applications

Erbium oxide with a chemical formula of Er2O3 is an oxide of erbium metal.

The applications of erbium oxide are varied due to their electrical, optical and photoluminescence properties. Nanoscale materials doped with Er+3 are of much interest because they have special particle-size-dependent optical and electrical properties. Erbium oxide doped nanoparticle materials can be dispersed in glass or plastic for display purposes, such as display monitors. The spectroscopy of Er+3 electronic transitions in host crystals lattices of nanoparticles combined with ultrasonically formed geometries in aqueous solution of carbon nanotubes is of great interest for synthesis of photoluminescence nanoparticles in ‘green’ chemistry. Erbium oxide is among the most important rare earth metals used in biomedicine. Erbium oxides are also used as gate dielectrics in semiconductor devices since it has a high dielectric constant (10–14) and a large band gap. Erbium is sometimes used as a coloring for glasses and erbium oxide can also be used as a burnable neutron poison for nuclear fuel.

Erbium oxide films obtained by sputtering can be used for their photoluminescence effect. You may read a patent from the link given below which is related to erbium oxide films’ photoluminescence effect.

https://patents.google.com/patent/US6846509

To see the crystallization behavior and mechanical properties of erbium oxide coatings fabricated by pulsed magnetron sputtering we advise you to look at the article given below:

http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.652.253&rep=rep1&type=pdf

If you need erbium oxide sputtering targets for your research needs, you can check the table below and give an order of erbium oxide sputtering targets related to your needs.

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