Silver is a chemical element with symbol Ag and atomic number 47. Silver is a soft, white, lustrous transition metal, it exhibits the highest electrical conductivity, thermal conductivity, and reflectivity of any metal.
Recently, there has been an increase in the number of applications of silver sputtering target, because of their unique optical, electrical and mechanical properties. By these properties silver plays an increasing role in many areas of today’s technology especially in the microelectronic device applications and optical industries. The ability to deposit thin films of various materials is important for the fabrication of modern microelectronic devices and for enabling a variety of investigations of fundamental physical principles. Interest in metal thin films as contacts in microelectronic devices such as silver, has increased for a wide range of applications including transparent conducting material, doped material, flat panel displays, light emitting diodes and solar cells.
Silver sputtering targets have many advantages for microelectronic devices like low specific resistivity, good thermal stability, high uniformity across the flat substrate, particle contamination, good adherence to substrate and low manufacturing costs.
Silver nanoparticles and sputtering targets are not just used for microelectronic devices. Silver nanoparticles and sputtering targets are reported to be useful for many applications also such as antibacterial activities, fluorescence, catalysis, and plasmon-based sensor. For silver nanoparticles with the sizes of less than 10 nm, they are highly required for biomedical applications, for example, diagnosis and treatment in which urinary excretion and elimination from the living body is possible.
Ag sputtering targets can be used to obtain films by using different sputtering methods. One of these methods is direct current magnetron sputtering. Direct current magnetron sputtering has long been used to fabricate thin films, nanostructured coatings, and nanoparticles of various materials, including metallic oxide, nitride, and carbide films.
To see the properties of silver nanoparticles and direct magnetron sputtering of silver sputtering targets you may check the paper given below:
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